Inventor

MARELLA PAUL FRANK

US6 patents

⚠️ This page may combine multiple inventors who share the name “MARELLA PAUL FRANK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR TECH CORP

3 patents

US7236847B2Jun 26, 2007

Systems and methods for closed loop defect reduction

KLA TENCOR TECH CORP56 citations93

US7738089B2Jun 15, 2010

Methods and systems for inspection of a specimen using different inspection parameters

KLA TENCOR TECH CORP7 citations71

US8384887B2Feb 26, 2013

Methods and systems for inspection of a specimen using different inspection parameters

KLA TENCOR TECH CORP1 citations49

KLA TENCOR TECH CORPORATION

2 patents

US10713771B2Jul 14, 2020

Methods and systems for inspection of wafers and reticles using designer intent data

KLA TENCOR TECH CORPORATION1 citations68

US11348222B2May 31, 2022

Methods and systems for inspection of wafers and reticles using designer intent data

KLA TENCOR TECH CORPORATION0 citations58

VOLK WILLIAM

1 patent

US9002497B2Apr 7, 2015

Methods and systems for inspection of wafers and reticles using designer intent data

VOLK WILLIAM14 citations86