Inventor
KOBAYASHI HIROKATSU
JP10 patents
⚠️ This page may combine multiple inventors who share the name “KOBAYASHI HIROKATSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUSD766850SSep 20, 2016
Wafer holder for manufacturing semiconductor
TOKYO ELECTRON LTD8 citations81
US7713886B2May 11, 2010
Film forming apparatus, film forming method, program and storage medium
TOKYO ELECTRON LTD6 citations60
US12065732B2Aug 20, 2024
Film forming method and film forming apparatus
TOKYO ELECTRON LTD0 citations48
US6924231B2Aug 2, 2005
Single wafer processing method and system for processing semiconductor
TOKYO ELECTRON LTD0 citations41
US10689759B2Jun 23, 2020
Film forming apparatus
TOKYO ELECTRON LTD0 citations38