Inventor
NGO SURE
US5 patents
Patents
5 patentsUS11621162B2Apr 4, 2023
Systems and methods for forming UV-cured low-κ dielectric films
APPLIED MATERIALS INC2 citations71
US9391024B2Jul 12, 2016
Multi-layer dielectric stack for plasma damage protection
APPLIED MATERIALS INC2 citations61
US9324571B2Apr 26, 2016
Post treatment for dielectric constant reduction with pore generation on low K dielectric films
APPLIED MATERIALS INC1 citations47
US9165998B2Oct 20, 2015
Adhesion layer to minimize dielectric constant increase with good adhesion strength in a PECVD process
APPLIED MATERIALS INC0 citations47
US8349746B2Jan 8, 2013
Microelectronic structure including a low k dielectric and a method of controlling carbon distribution in the structure
APPLIED MATERIALS INC0 citations40