Inventor
AHN JOON MO
KR5 patents
Patents
5 patentsUS9825421B2Nov 21, 2017
Single pulse laser apparatus
KOREA INST SCI & TECH3 citations72
US9188485B1Nov 17, 2015
Apparatus and method for extreme ultraviolet spectrometer calibration
KOREA INST SCI & TECH6 citations72
US9793677B1Oct 17, 2017
Single pulse laser apparatus
KOREA INST SCI & TECH4 citations71
US9844125B2Dec 12, 2017
Apparatus for generating extreme ultra-violet beam using multi-gas cell modules
KOREA INST SCI & TECH1 citations51
US9124067B2Sep 1, 2015
Pulse laser apparatus
KOREA INST SCI & TECH1 citations51