Inventor

LIPPERT JOHANNES

DE30 patents

⚠️ This page may combine multiple inventors who share the name “LIPPERT JOHANNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LIPPERT JOHANNES

ZEISS CARL SMT GMBH

Optical element unit

Mirror, in particular for a microlithographic projection exposure apparatus

Imaging device in a projection exposure facility

Substrate for mirrors for EUV lithography

Optical element unit

Optical element unit

Optical element unit

Device consisting of at least one optical element

Optical assembly, projection exposure apparatus and method

Mirror for a microlithographic projection exposure apparatus, and method for operating a deformable mirror

Optical element unit

Projection exposure apparatus with near-field manipulator

Optimum arrangement of actuator and sensor points on an optical element

Optical assembly, method for controlling an optical assembly, and projection exposure apparatus

Projection objective including an optical device

SKIDATA AG

Method of ordering location-specific services

Card-shaped data carrier and method for producing the same

Glove with a contactless data carrier

Non-transferable entitlement identity card

Method for controlling a service-providing device

ZEISS CARL SMT AG

Imaging device in a projection exposure facility

Device consisting of at least one optical element

Reflecting optical element with eccentric optical passageway

Imaging device in a projection exposure machine

Imaging device in a projection exposure machine

LIPPERT JOHANNES

Optical element unit

Optical element for UV or EUV lithography with coatings having optimized stress and thickness

MUEHLBEYER MICHAEL

Apparatus for manipulation of an optical element

HUMMEL WOLFGANG

Imaging device in a projection exposure facility

HOLDERER HUBERT

Optical system having heat dissipation arrangement