Inventor
REMBETSKI JOHN F
US6 patents
⚠️ This page may combine multiple inventors who share the name “REMBETSKI JOHN F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
5 patentsUS5466636ANov 14, 1995
Method of forming borderless contacts using a removable mandrel
IBM63 citations95
US5618379AApr 8, 1997
Selective deposition process
IBM24 citations92
US5298790AMar 29, 1994
Reactive ion etching buffer mask
IBM24 citations91
US5118384AJun 2, 1992
Reactive ion etching buffer mask
IBM41 citations91
US5053104AOct 1, 1991
Method of plasma etching a substrate with a gaseous organohalide compound
IBM6 citations60