Inventor
MCCULLOUGH KENNETH J
US23 patents
⚠️ This page may combine multiple inventors who share the name “MCCULLOUGH KENNETH J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
20 patentsUS6561220B2May 13, 2003
Apparatus and method for increasing throughput in fluid processing
IBM71 citations96
US6558475B1May 6, 2003
Process for cleaning a workpiece using supercritical carbon dioxide
IBM126 citations96
US6200891B1Mar 13, 2001
Removal of dielectric oxides
IBM54 citations96
US6656666B2Dec 2, 2003
Topcoat process to prevent image collapse
IBM27 citations92
US6254796B1Jul 3, 2001
Selective etching of silicate
IBM24 citations92
US6150282ANov 21, 2000
Selective removal of etching residues
IBM25 citations92
US6117796ASep 12, 2000
Removal of silicon oxide
IBM23 citations92
US6066267AMay 23, 2000
Etching of silicon nitride
IBM24 citations92
US6033996AMar 7, 2000
Process for removing etching residues, etching mask and silicon nitride and/or silicon dioxide
IBM48 citations92
US5965465AOct 12, 1999
Etching of silicon nitride
IBM28 citations92
US6584989B2Jul 1, 2003
Apparatus and method for wet cleaning
IBM50 citations90
US6736906B2May 18, 2004
Turbine part mount for supercritical fluid processor
IBM16 citations84
US6875286B2Apr 5, 2005
Solid CO2 cleaning
IBM15 citations82
US7081208B2Jul 25, 2006
Method to build a microfilter
IBM9 citations74
US6927393B2Aug 9, 2005
Method of in situ monitoring of supercritical fluid process conditions
IBM8 citations74
US6892741B2May 17, 2005
Apparatus and process for supercritical carbon dioxide phase processing
IBM5 citations71
US7288155B2Oct 30, 2007
Method for the rapid thermal control of a work piece in liquid or supercritical fluid
IBM3 citations63
US6821488B1Nov 23, 2004
Sample holding chuck for use in reactor and reactor using same
IBM4 citations63
US6953042B2Oct 11, 2005
Apparatus and process for supercritical carbon dioxide phase processing
IBM2 citations60
US6997197B2Feb 14, 2006
Apparatus and method for rapid thermal control of a workpiece in liquid or dense phase fluid
IBM0 citations52