Inventor
POPE KEITH R
US26 patents
⚠️ This page may combine multiple inventors who share the name “POPE KEITH R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
24 patentsUS6153043ANov 28, 2000
Elimination of photo-induced electrochemical dissolution in chemical mechanical polishing
IBM122 citations97
US6200891B1Mar 13, 2001
Removal of dielectric oxides
IBM54 citations96
US5007163AApr 16, 1991
Non-destructure method of performing electrical burn-in testing of semiconductor chips
IBM85 citations95
US6838015B2Jan 4, 2005
Liquid or supercritical carbon dioxide composition
IBM20 citations92
US6683008B1Jan 27, 2004
Process of removing ion-implanted photoresist from a workpiece
IBM19 citations92
US6454869B1Sep 24, 2002
Process of cleaning semiconductor processing, handling and manufacturing equipment
IBM24 citations92
US6398875B1Jun 4, 2002
Process of drying semiconductor wafers using liquid or supercritical carbon dioxide
IBM53 citations92
US6254796B1Jul 3, 2001
Selective etching of silicate
IBM24 citations92
US6150282ANov 21, 2000
Selective removal of etching residues
IBM25 citations92
US6117796ASep 12, 2000
Removal of silicon oxide
IBM23 citations92
US6066267AMay 23, 2000
Etching of silicon nitride
IBM24 citations92
US6033996AMar 7, 2000
Process for removing etching residues, etching mask and silicon nitride and/or silicon dioxide
IBM48 citations92
US5965465AOct 12, 1999
Etching of silicon nitride
IBM28 citations92
US6251787B1Jun 26, 2001
Elimination of photo-induced electrochemical dissolution in chemical mechanical polishing
IBM38 citations91
US6736906B2May 18, 2004
Turbine part mount for supercritical fluid processor
IBM16 citations84
US7081208B2Jul 25, 2006
Method to build a microfilter
IBM9 citations74
US6927393B2Aug 9, 2005
Method of in situ monitoring of supercritical fluid process conditions
IBM8 citations74
US6890855B2May 10, 2005
Process of removing residue material from a precision surface
IBM9 citations74
US6457480B1Oct 1, 2002
Process and apparatus for cleaning filters
IBM9 citations74
US7288155B2Oct 30, 2007
Method for the rapid thermal control of a work piece in liquid or supercritical fluid
IBM3 citations63
US6739346B2May 25, 2004
Apparatus for cleaning filters
IBM4 citations63
US6653233B2Nov 25, 2003
Process of providing a semiconductor device with electrical interconnection capability
IBM6 citations63
US6997197B2Feb 14, 2006
Apparatus and method for rapid thermal control of a workpiece in liquid or dense phase fluid
IBM0 citations52
US7332436B2Feb 19, 2008
Process of removing residue from a precision surface using liquid or supercritical carbon dioxide composition
IBM0 citations51