Inventor
NAGATOMO YU
JP5 patents
Patents
5 patentsUS11049730B2Jun 29, 2021
Workpiece processing method
TOKYO ELECTRON LTD2 citations70
US9779961B2Oct 3, 2017
Etching method
TOKYO ELECTRON LTD4 citations69
US10685848B2Jun 16, 2020
Workpiece processing method
TOKYO ELECTRON LTD0 citations49
US10566209B2Feb 18, 2020
Etching method and workpiece processing method
TOKYO ELECTRON LTD0 citations38
US9786512B2Oct 10, 2017
Etching method
TOKYO ELECTRON LTD0 citations34