Inventor
CUI JI JAMES
TW5 patents
Patents
5 patentsUS11679469B2Jun 20, 2023
Chemical mechanical planarization tool
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US12521838B2Jan 13, 2026
Microwave and infrared heating units for wet chemicals
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12172263B2Dec 24, 2024
Chemical mechanical planarization tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11517995B2Dec 6, 2022
Wet chemical heating system and a method of chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11260495B2Mar 1, 2022
Apparatus and methods for chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58