Inventor
TUCKER JEREMY
GB12 patents
⚠️ This page may combine multiple inventors who share the name “TUCKER JEREMY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
8 patentsUS10619245B2Apr 14, 2020
Hollow cathode discharge (HCD) suppressing capacitively coupled plasma electrode and gas distribution faceplate
LAM RES CORP25 citations93
US10217614B2Feb 26, 2019
Ceramic gas distribution plate with embedded electrode
LAM RES CORP32 citations92
US10077497B2Sep 18, 2018
Hollow cathode discharge (HCD) suppressing capacitively coupled plasma electrode and gas distribution faceplate
LAM RES CORP6 citations83
US9490149B2Nov 8, 2016
Chemical deposition apparatus having conductance control
LAM RES CORP18 citations83
US10781516B2Sep 22, 2020
Chemical deposition chamber having gas seal
LAM RES CORP2 citations71
US9875883B2Jan 23, 2018
Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching
LAM RES CORP0 citations51
US9754769B2Sep 5, 2017
Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching
LAM RES CORP0 citations51
US10808317B2Oct 20, 2020
Deposition apparatus including an isothermal processing zone
LAM RES CORP0 citations41