Inventor
PATEL SATYADEV R
US42 patents
⚠️ This page may combine multiple inventors who share the name “PATEL SATYADEV R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
REFLECTIVITY INC
27 patentsUS7002726B2Feb 21, 2006
Micromirror having reduced space between hinge and mirror plate of the micromirror
REFLECTIVITY INC183 citations99
US6900072B2May 31, 2005
Method for making a micromechanical device by using a sacrificial substrate
REFLECTIVITY INC93 citations99
US6849471B2Feb 1, 2005
Barrier layers for microelectromechanical systems
REFLECTIVITY INC166 citations99
US6844959B2Jan 18, 2005
Spatial light modulators with light absorbing areas
REFLECTIVITY INC300 citations99
US6906847B2Jun 14, 2005
Spatial light modulators with light blocking/absorbing areas
REFLECTIVITY INC120 citations98
US6290864B1Sep 18, 2001
Fluoride gas etching of silicon with improved selectivity
REFLECTIVITY INC140 citations98
US7041224B2May 9, 2006
Method for vapor phase etching of silicon
REFLECTIVITY INC72 citations97
US6960305B2Nov 1, 2005
Methods for forming and releasing microelectromechanical structures
REFLECTIVITY INC121 citations97
US6523961B2Feb 25, 2003
Projection system and mirror elements for improved contrast ratio in spatial light modulators
REFLECTIVITY INC191 citations97
US7019376B2Mar 28, 2006
Micromirror array device with a small pitch size
REFLECTIVITY INC35 citations96
US6972891B2Dec 6, 2005
Micromirror having reduced space between hinge and mirror plate of the micromirror
REFLECTIVITY INC54 citations96
US6969635B2Nov 29, 2005
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
REFLECTIVITY INC136 citations96
US6873450B2Mar 29, 2005
Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields
REFLECTIVITY INC49 citations96
US6867897B2Mar 15, 2005
Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays
REFLECTIVITY INC63 citations96
US6741383B2May 25, 2004
Deflectable micromirrors with stopping mechanisms
REFLECTIVITY INC64 citations96
US6995040B2Feb 7, 2006
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
REFLECTIVITY INC21 citations93
US6980347B2Dec 27, 2005
Micromirror having reduced space between hinge and mirror plate of the micromirror
REFLECTIVITY INC21 citations93
US6949202B1Sep 27, 2005
Apparatus and method for flow of process gas in an ultra-clean environment
REFLECTIVITY INC34 citations92
US6942811B2Sep 13, 2005
Method for achieving improved selectivity in an etching process
REFLECTIVITY INC19 citations92
US6885494B2Apr 26, 2005
High angle micro-mirrors and processes
REFLECTIVITY INC38 citations92
US6804039B1Oct 12, 2004
Multilayer hinge structures for micro-mirror arrays in projection displays
REFLECTIVITY INC37 citations92
US6800210B2Oct 5, 2004
Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants
REFLECTIVITY INC50 citations92
US7027200B2Apr 11, 2006
Etching method used in fabrications of microstructures
REFLECTIVITY INC11 citations84
US6995034B2Feb 7, 2006
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
REFLECTIVITY INC10 citations74
US6950223B2Sep 27, 2005
Multiple hinge MEMS device
REFLECTIVITY INC9 citations74
US6970280B2Nov 29, 2005
High angle micro-mirrors and processes
REFLECTIVITY INC7 citations73
US6952302B2Oct 4, 2005
Hinge structures for micro-mirror arrays
REFLECTIVITY INC2 citations63
TEXAS INSTRUMENTS INC
14 patentsUS7436573B2Oct 14, 2008
Electrical connections in microelectromechanical devices
TEXAS INSTRUMENTS INC61 citations98
US7198982B2Apr 3, 2007
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
TEXAS INSTRUMENTS INC52 citations96
US7573111B2Aug 11, 2009
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
TEXAS INSTRUMENTS INC7 citations74
US7449358B2Nov 11, 2008
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
TEXAS INSTRUMENTS INC4 citations74
US7405860B2Jul 29, 2008
Spatial light modulators with light blocking/absorbing areas
TEXAS INSTRUMENTS INC7 citations74
US7286278B2Oct 23, 2007
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
TEXAS INSTRUMENTS INC4 citations74
US7189332B2Mar 13, 2007
Apparatus and method for detecting an endpoint in a vapor phase etch
TEXAS INSTRUMENTS INC8 citations73
US7671428B2Mar 2, 2010
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
TEXAS INSTRUMENTS INC2 citations63
US7655492B2Feb 2, 2010
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
TEXAS INSTRUMENTS INC2 citations63
US7629190B2Dec 8, 2009
Method for making a micromechanical device by using a sacrificial substrate
TEXAS INSTRUMENTS INC1 citations63
US7586668B2Sep 8, 2009
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
TEXAS INSTRUMENTS INC1 citations63
US7866036B2Jan 11, 2011
Method of fabricating micromirror device
TEXAS INSTRUMENTS INC0 citations52
US7514012B2Apr 7, 2009
Pre-oxidization of deformable elements of microstructures
TEXAS INSTRUMENTS INC0 citations52
US7422920B2Sep 9, 2008
Method and forming a micromirror array device with a small pitch size
TEXAS INSTRUMENTS INC0 citations52