Inventor
HEUREUX PETER J
US8 patents
Patents
8 patentsUS6396619B1May 28, 2002
Deflectable spatial light modulator having stopping mechanisms
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US6529310B1Mar 4, 2003
Deflectable spatial light modulator having superimposed hinge and deflectable element
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US6337760B1Jan 8, 2002
Encapsulated multi-directional light beam steering device
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US6741383B2May 25, 2004
Deflectable micromirrors with stopping mechanisms
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US6885494B2Apr 26, 2005
High angle micro-mirrors and processes
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US6800210B2Oct 5, 2004
Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants
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US7099065B2Aug 29, 2006
Micromirrors with OFF-angle electrodes and stops
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US6970280B2Nov 29, 2005
High angle micro-mirrors and processes
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