Inventor
ROMBACH PIRMIN
DE15 patents
⚠️ This page may combine multiple inventors who share the name “ROMBACH PIRMIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SONIONMEMS AS
3 patentsUS6732588B1May 11, 2004
Pressure transducer
SONIONMEMS AS138 citations95
US6622368B1Sep 23, 2003
Method of manufacturing a transducer having a diaphragm with a predetermined tension
SONIONMEMS AS23 citations91
US7054460B2May 30, 2006
Micromachined magnetically balanced membrane actuator
SONIONMEMS AS28 citations89
TDK CORP
3 patentsUS11388496B2Jul 12, 2022
Microelectromechanical microphone having a stoppage member
TDK CORP5 citations71
US12116269B2Oct 15, 2024
Microelectromechanical microphone having a robust backplate
TDK CORP0 citations62
US12269734B2Apr 8, 2025
Microelectromechanical microphone with membrane trench reinforcements and method of fabrication
TDK CORP0 citations46