Inventor
ROBERTS MICHAEL PHILIP
US10 patents
Patents
10 patentsUS11236422B2Feb 1, 2022
Multi zone substrate support for ALD film property correction and tunability
LAM RES CORP3 citations70
US12531220B2Jan 20, 2026
Automated feedforward and feedback sequence for patterning CD control
LAM RES CORP0 citations62
US12209312B2Jan 28, 2025
Temperature control of a multi-zone pedestal
LAM RES CORP0 citations60
US11535936B2Dec 27, 2022
Dual gas feed showerhead for deposition
LAM RES CORP1 citations57
US12308264B2May 20, 2025
Rapid tuning of critical dimension non-uniformity by modulating temperature transients of multi-zone substrate supports
LAM RES CORP0 citations51
US12186851B2Jan 7, 2025
Use of vacuum during transfer of substrates
LAM RES CORP0 citations51
US12110586B2Oct 8, 2024
Pedestals for modulating film properties in atomic layer deposition (ALD) substrate processing chambers
LAM RES CORP0 citations51
US12142509B2Nov 12, 2024
Electrostatic chuck with seal surface
LAM RES CORP0 citations50
US12071689B2Aug 27, 2024
Trim and deposition profile control with multi-zone heated substrate support for multi-patterning processes
LAM RES CORP0 citations46
US12400880B2Aug 26, 2025
Apparatuses for uniform fluid delivery in a multi-station semiconductor processing chamber
LAM RES CORP0 citations41