Inventor
GRAHAM GABRIEL HAY
US9 patents
Patents
9 patentsUS10094034B2Oct 9, 2018
Edge flow element for electroplating apparatus
LAM RES CORP11 citations83
US10233556B2Mar 19, 2019
Dynamic modulation of cross flow manifold during electroplating
LAM RES CORP7 citations82
US10094035B1Oct 9, 2018
Convection optimization for mixed feature electroplating
LAM RES CORP14 citations78
US9988733B2Jun 5, 2018
Apparatus and method for modulating azimuthal uniformity in electroplating
LAM RES CORP3 citations72
US11585007B2Feb 21, 2023
Cross flow conduit for foaming prevention in high convection plating cells
LAM RES CORP2 citations71
US12157949B2Dec 3, 2024
Cross flow conduit for foaming prevention in high convection plating cells
LAM RES CORP1 citations60
US11746435B2Sep 5, 2023
Removing bubbles from plating cells
LAM RES CORP0 citations57
US11214887B2Jan 4, 2022
Removing bubbles from plating cell
LAM RES CORP0 citations57
US10655240B2May 19, 2020
Removing bubbles from plating cells
LAM RES CORP0 citations46