Inventor
KEARNS GREGORY J
US5 patents
⚠️ This page may combine multiple inventors who share the name “KEARNS GREGORY J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
3 patentsUS11585007B2Feb 21, 2023
Cross flow conduit for foaming prevention in high convection plating cells
LAM RES CORP2 citations71
US12157949B2Dec 3, 2024
Cross flow conduit for foaming prevention in high convection plating cells
LAM RES CORP1 citations60
US12241173B2Mar 4, 2025
Wafer shielding for prevention of lipseal plate-out
LAM RES CORP0 citations59