P

Inventor

BAUR CHRISTOF

US39 patents
⚠️ This page may combine multiple inventors who share the name “BAUR CHRISTOF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

28 patents
US9336983B2May 10, 2016

Scanning particle microscope and method for determining a position change of a particle beam of the scanning particle microscope

ZEISS CARL SMT GMBH8 citations75
US11237187B2Feb 1, 2022

Method and apparatus for examining a measuring tip of a scanning probe microscope

ZEISS CARL SMT GMBH2 citations71
US11429020B2Aug 30, 2022

Method and apparatus for removing a particle from a photolithographic mask

ZEISS CARL SMT GMBH1 citations70
US11965910B2Apr 23, 2024

Device and method for operating a bending beam in a closed control loop

ZEISS CARL SMT GMBH1 citations69
US11630124B2Apr 18, 2023

Device and method for operating a bending beam in a closed control loop

ZEISS CARL SMT GMBH3 citations69
US9995764B2Jun 12, 2018

Method and apparatus for avoiding damage when analysing a sample surface with a scanning probe microscope

ZEISS CARL SMT GMBH2 citations66
US12292680B2May 6, 2025

Method and apparatuses for disposing of excess material of a photolithographic mask

ZEISS CARL SMT GMBH0 citations62
US12164226B2Dec 10, 2024

Method and apparatuses for disposing of excess material of a photolithographic mask

ZEISS CARL SMT GMBH0 citations62
US11874598B2Jan 16, 2024

Method and apparatuses for disposing of excess material of a photolithographic mask

ZEISS CARL SMT GMBH0 citations62
US11796563B2Oct 24, 2023

Apparatus and method for a scanning probe microscope

ZEISS CARL SMT GMBH0 citations62
US11592461B2Feb 28, 2023

Apparatus and method for examining and/or processing a sample

ZEISS CARL SMT GMBH0 citations62
US11262378B2Mar 1, 2022

Apparatus and method for examining and/or processing a sample

ZEISS CARL SMT GMBH0 citations62
US11237185B2Feb 1, 2022

Apparatus and method for a scanning probe microscope

ZEISS CARL SMT GMBH1 citations62
US11054439B2Jul 6, 2021

Scanning probe microscope and method for increasing a scan speed of a scanning probe microscope in the step-in scan mode

ZEISS CARL SMT GMBH0 citations62
US11733186B2Aug 22, 2023

Device and method for analyzing a defect of a photolithographic mask or of a wafer

ZEISS CARL SMT GMBH0 citations61
US11680963B2Jun 20, 2023

Method and apparatus for examining a measuring tip of a scanning probe microscope

ZEISS CARL SMT GMBH0 citations61
US10983075B2Apr 20, 2021

Device and method for analysing a defect of a photolithographic mask or of a wafer

ZEISS CARL SMT GMBH1 citations61
US12517426B2Jan 6, 2026

Method and apparatus for removing a particle from a photolithographic mask

ZEISS CARL SMT GMBH0 citations60
US11899359B2Feb 13, 2024

Method and apparatus for removing a particle from a photolithographic mask

ZEISS CARL SMT GMBH0 citations60
US11977097B2May 7, 2024

Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope

ZEISS CARL SMT GMBH0 citations59
US11353478B2Jun 7, 2022

Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope

ZEISS CARL SMT GMBH0 citations59
US12405289B2Sep 2, 2025

Device and method for operating a bending beam in a closed control loop

ZEISS CARL SMT GMBH0 citations58
US10578644B2Mar 3, 2020

Probe system and method for receiving a probe of a scanning probe microscope

ZEISS CARL SMT GMBH1 citations56
US12517442B2Jan 6, 2026

Apparatus and method for removing a single particulate from a substrate

ZEISS CARL SMT GMBH0 citations55
US11886126B2Jan 30, 2024

Apparatus and method for removing a single particulate from a substrate

ZEISS CARL SMT GMBH1 citations55
US12493238B2Dec 9, 2025

Method, device and computer program for repairing a mask defect

ZEISS CARL SMT GMBH0 citations45
US10119990B2Nov 6, 2018

Scanning probe microscope and method for examining a surface with a high aspect ratio

ZEISS CARL SMT GMBH0 citations42
US10410820B2Sep 10, 2019

Beam blanker and method for blanking a charged particle beam

ZEISS CARL SMT GMBH0 citations41

ZYVEX CORP

5 patents

ZYVEX INSTR LLC

2 patents

ZYVEX LABS LLC

2 patents

ZEISS CARL SMS GMBH

2 patents