Inventor
BAUR CHRISTOF
US39 patents
⚠️ This page may combine multiple inventors who share the name “BAUR CHRISTOF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
28 patentsUS9336983B2May 10, 2016
Scanning particle microscope and method for determining a position change of a particle beam of the scanning particle microscope
ZEISS CARL SMT GMBH8 citations75
US11237187B2Feb 1, 2022
Method and apparatus for examining a measuring tip of a scanning probe microscope
ZEISS CARL SMT GMBH2 citations71
US11429020B2Aug 30, 2022
Method and apparatus for removing a particle from a photolithographic mask
ZEISS CARL SMT GMBH1 citations70
US11965910B2Apr 23, 2024
Device and method for operating a bending beam in a closed control loop
ZEISS CARL SMT GMBH1 citations69
US11630124B2Apr 18, 2023
Device and method for operating a bending beam in a closed control loop
ZEISS CARL SMT GMBH3 citations69
US9995764B2Jun 12, 2018
Method and apparatus for avoiding damage when analysing a sample surface with a scanning probe microscope
ZEISS CARL SMT GMBH2 citations66
US12292680B2May 6, 2025
Method and apparatuses for disposing of excess material of a photolithographic mask
ZEISS CARL SMT GMBH0 citations62
US12164226B2Dec 10, 2024
Method and apparatuses for disposing of excess material of a photolithographic mask
ZEISS CARL SMT GMBH0 citations62
US11874598B2Jan 16, 2024
Method and apparatuses for disposing of excess material of a photolithographic mask
ZEISS CARL SMT GMBH0 citations62
US11796563B2Oct 24, 2023
Apparatus and method for a scanning probe microscope
ZEISS CARL SMT GMBH0 citations62
US11592461B2Feb 28, 2023
Apparatus and method for examining and/or processing a sample
ZEISS CARL SMT GMBH0 citations62
US11262378B2Mar 1, 2022
Apparatus and method for examining and/or processing a sample
ZEISS CARL SMT GMBH0 citations62
US11237185B2Feb 1, 2022
Apparatus and method for a scanning probe microscope
ZEISS CARL SMT GMBH1 citations62
US11054439B2Jul 6, 2021
Scanning probe microscope and method for increasing a scan speed of a scanning probe microscope in the step-in scan mode
ZEISS CARL SMT GMBH0 citations62
US11733186B2Aug 22, 2023
Device and method for analyzing a defect of a photolithographic mask or of a wafer
ZEISS CARL SMT GMBH0 citations61
US11680963B2Jun 20, 2023
Method and apparatus for examining a measuring tip of a scanning probe microscope
ZEISS CARL SMT GMBH0 citations61
US10983075B2Apr 20, 2021
Device and method for analysing a defect of a photolithographic mask or of a wafer
ZEISS CARL SMT GMBH1 citations61
US12517426B2Jan 6, 2026
Method and apparatus for removing a particle from a photolithographic mask
ZEISS CARL SMT GMBH0 citations60
US11899359B2Feb 13, 2024
Method and apparatus for removing a particle from a photolithographic mask
ZEISS CARL SMT GMBH0 citations60
US11977097B2May 7, 2024
Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope
ZEISS CARL SMT GMBH0 citations59
US11353478B2Jun 7, 2022
Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope
ZEISS CARL SMT GMBH0 citations59
US12405289B2Sep 2, 2025
Device and method for operating a bending beam in a closed control loop
ZEISS CARL SMT GMBH0 citations58
US10578644B2Mar 3, 2020
Probe system and method for receiving a probe of a scanning probe microscope
ZEISS CARL SMT GMBH1 citations56
US12517442B2Jan 6, 2026
Apparatus and method for removing a single particulate from a substrate
ZEISS CARL SMT GMBH0 citations55
US11886126B2Jan 30, 2024
Apparatus and method for removing a single particulate from a substrate
ZEISS CARL SMT GMBH1 citations55
US12493238B2Dec 9, 2025
Method, device and computer program for repairing a mask defect
ZEISS CARL SMT GMBH0 citations45
US10119990B2Nov 6, 2018
Scanning probe microscope and method for examining a surface with a high aspect ratio
ZEISS CARL SMT GMBH0 citations42
US10410820B2Sep 10, 2019
Beam blanker and method for blanking a charged particle beam
ZEISS CARL SMT GMBH0 citations41
ZYVEX CORP
5 patentsUS7196454B2Mar 27, 2007
Positioning device for microscopic motion
ZYVEX CORP72 citations92
US6987277B2Jan 17, 2006
Systems and method for picking and placing of nanoscale objects utilizing differences in chemical and physical binding forces
ZYVEX CORP26 citations92
US6812460B1Nov 2, 2004
Nano-manipulation by gyration
ZYVEX CORP36 citations92
US6608307B1Aug 19, 2003
System and method for accurate positioning of a scanning probe microscope
ZYVEX CORP40 citations92
US7285778B2Oct 23, 2007
Probe current imaging
ZYVEX CORP8 citations73