Inventor
KIM YOUNGHOO
KR12 patents
Patents
12 patentsUS12287147B2Apr 29, 2025
Wafer processing equipment and method of manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD1 citations63
US12422754B2Sep 23, 2025
Substrate processing apparatus, semiconductor manufacturing equipment, and substrate processing method
SAMSUNG ELECTRONICS CO LTD0 citations61
US12308255B2May 20, 2025
Apparatus and method for drying substrate
SAMSUNG ELECTRONICS CO LTD0 citations61
US12057323B2Aug 6, 2024
Substrate processing method, micropattern forming method, and substrate processing apparatus
SAMSUNG ELECTRONICS CO LTD0 citations61
US11935772B2Mar 19, 2024
Apparatus for processing a substrate
SAMSUNG ELECTRONICS CO LTD0 citations61
US11640115B2May 2, 2023
Substrate processing apparatus, semiconductor manufacturing equipment, and substrate processing method
SAMSUNG ELECTRONICS CO LTD0 citations61
US11798801B2Oct 24, 2023
Apparatus including light source supplying light to wafer and window protector receiving a portion of chemical liquid
SAMSUNG ELECTRONICS CO LTD0 citations58
US11482410B2Oct 25, 2022
Apparatus including light source supplying light to wafer and window protector receiving a portion of chemical liquid
SAMSUNG ELECTRONICS CO LTD0 citations58
US12523935B2Jan 13, 2026
Substrate processing method using low temperature developer and semiconductor device manufacturing apparatus using the same
SAMSUNG ELECTRONICS CO LTD0 citations51
US12225634B2Feb 11, 2025
Substrate heating apparatus and method for processing a substrate
SAMSUNG ELECTRONICS CO LTD0 citations51
US12216408B2Feb 4, 2025
Apparatus for drying wafer and method for drying wafer
SAMSUNG ELECTRONICS CO LTD0 citations51
US12293901B2May 6, 2025
Substrate processing apparatus including shower head and edge ring and related methods of manufacturing semiconductor devices
SAMSUNG ELECTRONICS CO LTD0 citations49