Inventor

CHEN YI-NAN

TW135 patents

⚠️ This page may combine multiple inventors who share the name “CHEN YI-NAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHEN YI-NAN

NANYA TECHNOLOGY CORP

Method for forming vertical transistor and trench capacitor

Method of fabricating a bottle shaped deep trench for trench capacitor DRAM devices

Method of fabricating a shallow trench isolation structure

Method of forming a bottle-shaped trench in a semiconductor substrate

Method of fabricating shallow trench isolation

Method of forming a shallow trench isolation in a semiconductor substrate

Method for forming self-aligned contact in semiconductor device

Contact etching utilizing multi-layer hard mask

Contact etching utilizing multi-layer hard mask

Method of forming a memory cell with a single sided buried strap

Method for forming bottle-shaped trenches

Bit line contact structure and method for forming the same

Method of fabricating shallow trench isolation

Method of forming a bottle-shaped trench in a semiconductor substrate

Method of rounding the corner of a shallow trench isolation region

Method of forming a trench-type capacitor

Self-aligned method for forming contact of device with reduced step height

Fabrication method for a damascene bit line contact plug

Method for forming contact holes

Method of forming metal plug

Method for forming bottle trench

Method of reducing the aspect ratio of a trench

Method for forming bottle-shaped trench

Multi-layer hard mask structure for etching deep trench in substrate

Method of metal etching post cleaning

Method for forming crack stop structure

Method for preventing leakage in shallow trench isolation

Shallow trench isolation void detecting method and structure for the same

Interconnect structure and method for fabricating the same

Deep trench self-alignment process for an active area of a partial vertical cell

Method of filling bit line contact via

Interconnect structure and method for fabricating the same

Partial vertical memory cell and method of fabricating the same

Method of forming geometric deep trench capacitors

Split gate flash memory cell and manufacturing method thereof

Dynamic random access memory cell layout and fabrication method thereof

Method for forming uniform bottom electrode in trench of trench capacitor

Method to prevent electrical shorts between tungsten interconnects

Method of forming adjacent holes on a semiconductor substrate

Method for increasing capacitance of deep trench capacitors

Method for forming contact

Method of forming inter-metal dielectric

HO JAR-MING

Antifuse element for integrated circuit device

Method for forming conductive contact

WU TIEH-CHIANG

Method of forming a slit recess channel gate

Transistor with buried fins

LITE ON TECHNOLOGY CORP

Packing structure of light-emitting diode

SHIH SHING-YIH

Method for increasing adhesion between polysilazane and silicon nitride

LIN CHIH CHING

Method for via formation in a semiconductor device

LEE HSIU-CHUN

Method of forming a trench by a silicon-containing mask