Inventor
MATSUZAWA TOSHIHARU
JP4 patents
Patents
4 patentsUS4904569AFeb 27, 1990
Method of forming pattern and projection aligner for carrying out the same
HITACHI LTD64 citations96
US4670650AJun 2, 1987
Method of measuring resist pattern
HITACHI LTD26 citations91
US4536421AAug 20, 1985
Method of forming a microscopic pattern
HITACHI LTD37 citations89
US4614706ASep 30, 1986
Method of forming a microscopic pattern with far UV pattern exposure, alkaline solution development, and dry etching
HITACHI LTD16 citations71