Inventor
INUZIMA TAKASHI
JP3 patents
Patents
3 patentsUS4950624AAug 21, 1990
Method of depositing films using photo-CVD with chamber plasma cleaning
SEMICONDUCTOR ENERGY LAB356 citations97
US5091638AFeb 25, 1992
Contact image sensor having light-receiving windows
SEMICONDUCTOR ENERGY LAB8 citations73
US4959533ASep 25, 1990
Photosensitive semiconductor contact image sensor
SEMICONDUCTOR ENERGY LAB12 citations73