Inventor
IIO ITSUSHI
JP4 patents
⚠️ This page may combine multiple inventors who share the name “IIO ITSUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO HEAVY INDUSTRIES
3 patentsUS7060990B2Jun 13, 2006
Stage base, substrate processing apparatus, and maintenance method for stage
SUMITOMO HEAVY INDUSTRIES14 citations82
US5144827ASep 8, 1992
Rolling mill stand
SUMITOMO HEAVY INDUSTRIES13 citations69
US7361905B2Apr 22, 2008
Substrate processing apparatus and maintenance method therefor
SUMITOMO HEAVY INDUSTRIES2 citations60