Inventor
KUJI MOTOHIRO
JP3 patents
Patents
3 patentsUS5910727AJun 8, 1999
Electrical inspecting apparatus with ventilation system
TOKYO ELECTRON LTD103 citations94
US5640101AJun 17, 1997
Probe system and probe method
TOKYO ELECTRON LTD90 citations94
US5585738ADec 17, 1996
Probe system having vertical height detection and double focal image pickup coinciding with probe contact in height adjustment
TOKYO ELECTRON LTD30 citations90