P

Inventor

HARANO RIICHIRO

JP5 patents
⚠️ This page may combine multiple inventors who share the name “HARANO RIICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SPROUT CO LTD

3 patents
US6725565B2Apr 27, 2004

Method for vacuum drying of substrate

SPROUT CO LTD19 citations87
US6220935B1Apr 24, 2001

Apparatus and method for cleaning substrate

SPROUT CO LTD20 citations86
US6676766B2Jan 13, 2004

Method for cleaning a substrate using a sherbet-like composition

SPROUT CO LTD8 citations64

HARANO RIICHIRO

1 patent
US8196594B2Jun 12, 2012

Apparatus for removing foreign material from substrate and method for removing foreign material from substrate

HARANO RIICHIRO3 citations56

MIYASHITA KINYA

1 patent
US8158238B2Apr 17, 2012

Electrostatic chuck and electrode sheet for electrostatic chuck

MIYASHITA KINYA3 citations55