Inventor
VOELCKER MARTIN
DE11 patents
⚠️ This page may combine multiple inventors who share the name “VOELCKER MARTIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS STIFTUNG
4 patentsUS6686582B1Feb 3, 2004
Optical array system and reader for microtiter plates
ZEISS STIFTUNG133 citations93
US6473239B2Oct 29, 2002
Imaging system with a cylindrical lens array
ZEISS STIFTUNG30 citations92
US5986262ANov 16, 1999
Probe array for a scanning probe microscope
ZEISS STIFTUNG18 citations91
US5677525AOct 14, 1997
Ancillary module for making a spatially-resolved measurement of a focus volume
ZEISS STIFTUNG47 citations88
ZEISS CARL SMT GMBH
3 patentsUS11269260B2Mar 8, 2022
Method and assembly for characterizing a mask or a wafer for microlithography
ZEISS CARL SMT GMBH2 citations71
US11774870B2Oct 3, 2023
Method for removing a particle from a mask system
ZEISS CARL SMT GMBH0 citations55
US11003090B2May 11, 2021
Lithography apparatus comprising a plurality of individually controllable write heads
ZEISS CARL SMT GMBH0 citations48