Inventor
MIURA SEIYA
JP16 patents
⚠️ This page may combine multiple inventors who share the name “MIURA SEIYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
14 patentsUS5585916ADec 17, 1996
Surface inspecting device
CANON KK64 citations96
US7193685B2Mar 20, 2007
Exposure apparatus
CANON KK22 citations92
US5652657AJul 29, 1997
Inspection system for original with pellicle
CANON KK44 citations92
US5581348ADec 3, 1996
Surface inspecting device using bisected multi-mode laser beam and system having the same
CANON KK46 citations92
US5160962ANov 3, 1992
Projection exposure apparatus
CANON KK49 citations92
US5963316AOct 5, 1999
Method and apparatus for inspecting a surface state
CANON KK32 citations91
US7221434B2May 22, 2007
Exposure method and apparatus
CANON KK9 citations73
US5815607ASep 29, 1998
Image reading device, and inspection apparatus and exposure apparatus using the device
CANON KK9 citations73
US7656503B2Feb 2, 2010
Exposure apparatus and image plane detecting method
CANON KK5 citations62
US7050151B2May 23, 2006
Exposure apparatus, exposure method, and device manufacturing method
CANON KK6 citations62
US9645514B2May 9, 2017
Imprint apparatus, imprint method, and device manufacturing method
CANON KK0 citations51
US9718234B2Aug 1, 2017
Imprint lithography apparatus and device manufacturing method therefor
CANON KK0 citations41
US9564374B2Feb 7, 2017
Forming method and method of manufacturing article
CANON KK0 citations41
US7348107B2Mar 25, 2008
Reticle, semiconductor exposure apparatus and method, and semiconductor device manufacturing method
CANON KK0 citations41