P

Inventor

HIRSCHFELD BOTHO

DE8 patents
⚠️ This page may combine multiple inventors who share the name “HIRSCHFELD BOTHO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CASCADE MICROTECH INC

3 patents
US8344744B2Jan 1, 2013

Probe station for on-wafer-measurement under EMI-shielding

CASCADE MICROTECH INC3 citations61
US9377423B2Jun 28, 2016

Systems and methods for handling substrates at below dew point temperatures

CASCADE MICROTECH INC0 citations40
US9373533B2Jun 21, 2016

Systems and methods for providing wafer access in a wafer processing system

CASCADE MICROTECH INC0 citations39

KARL SUSS DRESDEN GMBH

1 patent
US6688156B2Feb 10, 2004

Tester for pressure sensors

KARL SUSS DRESDEN GMBH21 citations88

DIETRICH CLAUS

1 patent
US9110131B2Aug 18, 2015

Method and device for contacting a row of contact areas with probe tips

DIETRICH CLAUS5 citations65

KANEV STOJAN

1 patent
US9194885B2Nov 24, 2015

Modular prober and method for operating same

KANEV STOJAN3 citations58

HIRSCHFELD BOTHO

1 patent
US8922229B2Dec 30, 2014

Method for measurement of a power device

HIRSCHFELD BOTHO2 citations55

SUSS MICROTEC TEST SYS GMBH

1 patent
US7282930B2Oct 16, 2007

Device for testing thin elements

SUSS MICROTEC TEST SYS GMBH2 citations55