Inventor

ENGELMANN SEBASTIAN ULRICH

US5 patents

⚠️ This page may combine multiple inventors who share the name “ENGELMANN SEBASTIAN ULRICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ENGELMANN SEBASTIAN ULRICH

2 patents

US8658050B2Feb 25, 2014

Method to transfer lithographic patterns into inorganic substrates

ENGELMANN SEBASTIAN ULRICH6 citations68

US8232171B2Jul 31, 2012

Structure with isotropic silicon recess profile in nanoscale dimensions

ENGELMANN SEBASTIAN ULRICH2 citations58

IBM

2 patents

US12329044B2Jun 10, 2025

Applying inert ion beam etching for improving a profile and repairing sidewall damage for phase change memory devices

IBM0 citations54

US11270893B2Mar 8, 2022

Layer-by-layer etching of poly-granular metal-based materials for semiconductor structures

IBM0 citations49

TOKYO ELECTRON LTD

1 patent

US12057322B2Aug 6, 2024

Methods for etching metal films using plasma processing

TOKYO ELECTRON LTD0 citations59