Inventor
MO WANG-PEN
TW15 patents
⚠️ This page may combine multiple inventors who share the name “MO WANG-PEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
5 patentsUS9349662B2May 24, 2016
Test structure placement on a semiconductor wafer
TAIWAN SEMICONDUCTOR MFG5 citations69
US9285677B2Mar 15, 2016
Lithography process on high topology features
TAIWAN SEMICONDUCTOR MFG2 citations61
US9153620B2Oct 6, 2015
Method of fabricating a metal grid for semiconductor device
TAIWAN SEMICONDUCTOR MFG2 citations60
US9372406B2Jun 21, 2016
Film portion at wafer edge
TAIWAN SEMICONDUCTOR MFG1 citations52
US9360755B2Jun 7, 2016
Thickening phase for spin coating process
TAIWAN SEMICONDUCTOR MFG0 citations41
CHEN CHUN-CHANG
4 patentsUS8771534B2Jul 8, 2014
Manufacturing techniques for workpieces with varying topographies
CHEN CHUN-CHANG0 citations49
US8692296B2Apr 8, 2014
Semiconductor devices and manufacturing methods thereof
CHEN CHUN-CHANG0 citations49
US8883403B2Nov 11, 2014
Method of semiconductor integrated circuit fabrication
CHEN CHUN-CHANG0 citations47
US8623229B2Jan 7, 2014
Manufacturing techniques to limit damage on workpiece with varying topographies
CHEN CHUN-CHANG0 citations39
TAIWAN SEMICONDUCTOR MFG CO LTD
3 patentsUS9875892B2Jan 23, 2018
Method of forming a photoresist layer
TAIWAN SEMICONDUCTOR MFG CO LTD70 citations97
US9651869B2May 16, 2017
Film portion at wafer edge
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations52
US9791775B2Oct 17, 2017
Lithography process on high topology features
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51