Inventor
KAJIWARA TAKENORI
SG18 patents
⚠️ This page may combine multiple inventors who share the name “KAJIWARA TAKENORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HOYA CORP
9 patentsUS10606164B2Mar 31, 2020
Mask blank, phase shift mask, and method for manufacturing semiconductor device
HOYA CORP2 citations73
US10551734B2Feb 4, 2020
Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device
HOYA CORP2 citations73
US10481486B2Nov 19, 2019
Mask blank, phase shift mask, and method for manufacturing semiconductor device
HOYA CORP4 citations73
US10146123B2Dec 4, 2018
Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device
HOYA CORP3 citations73
US10114281B2Oct 30, 2018
Mask blank, phase shift mask, and method for manufacturing semiconductor device
HOYA CORP4 citations73
US10942441B2Mar 9, 2021
Mask blank, phase shift mask, and method for manufacturing semiconductor device
HOYA CORP1 citations62
US10481485B2Nov 19, 2019
Mask blank, transfer mask, method of manufacturing transfer mask and method of manufacturing semiconductor device
HOYA CORP1 citations62
US11054735B2Jul 6, 2021
Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device
HOYA CORP0 citations52
US10935881B2Mar 2, 2021
Mask blank, phase shift mask, phase shift mask manufacturing method, and semiconductor device manufacturing method
HOYA CORP0 citations52