Inventor

HO KUO-YUAN

TW2 patents

Patents

2 patents

US9437433B2Sep 6, 2016

Method and apparatus for cooling wafer in ion implantation process

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations34

US9412595B2Aug 9, 2016

Systems and methods for intelligent dispatching for wafer processing

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations32