Inventor
KAWAMATA YOSHIO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “KAWAMATA YOSHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHIBAURA MECHATRONICS CORP
7 patentsUS6416638B1Jul 9, 2002
Power supply unit for sputtering device
SHIBAURA MECHATRONICS CORP67 citations94
US11127574B2Sep 21, 2021
Plasma processing apparatus
SHIBAURA MECHATRONICS CORP3 citations71
US7462578B2Dec 9, 2008
Method and apparatus for producing photocatalyst
SHIBAURA MECHATRONICS CORP5 citations70
US7799731B2Sep 21, 2010
Photocatalyst element, method and device for preparing the same
SHIBAURA MECHATRONICS CORP3 citations59
US11004665B2May 11, 2021
Plasma processing apparatus
SHIBAURA MECHATRONICS CORP0 citations51
US8022011B2Sep 20, 2011
Photocatalyst element, method and device for preparing the same
SHIBAURA MECHATRONICS CORP0 citations48
US7608562B2Oct 27, 2009
Method and apparatus for producing photocatalyst
SHIBAURA MECHATRONICS CORP1 citations48