Inventor
DEWA HIROAKI
JP3 patents
Patents
3 patentsUS9766617B2Sep 19, 2017
Substrate processing apparatus
TOKYO ELECTRON LTD1 citations48
US11621185B2Apr 4, 2023
Semiconductor manufacturing apparatus and method for transferring wafer
TOKYO ELECTRON LTD0 citations45
US12344936B2Jul 1, 2025
Liquid raw material supplying method and gas supply apparatus
TOKYO ELECTRON LTD0 citations44