Inventor
TAMURA HIFUMI
JP31 patents
Patents
31 patentsUS4774414ASep 27, 1988
Liquid metal ion source
HITACHI LTD56 citations96
US4835399AMay 30, 1989
Charged particle beam apparatus
HITACHI LTD24 citations93
US4755685AJul 5, 1988
Ion micro beam apparatus
HITACHI LTD41 citations93
US4710632ADec 1, 1987
Ion microbeam apparatus
HITACHI LTD28 citations93
US4697086ASep 29, 1987
Apparatus for implanting ion microbeam
HITACHI LTD35 citations93
US4687938AAug 18, 1987
Ion source
HITACHI LTD38 citations93
US4740698AApr 26, 1988
Hybrid charged particle apparatus
HITACHI LTD32 citations92
US5008537AApr 16, 1991
Composite apparatus with secondary ion mass spectrometry instrument and scanning electron microscope
HITACHI LTD43 citations89
US5278407AJan 11, 1994
Secondary-ion mass spectrometry apparatus using field limiting method
HITACHI LTD29 citations87
US4992661AFeb 12, 1991
Method and apparatus for neutralizing an accumulated charge on a specimen by means of a conductive lattice deposited on the specimen
HITACHI LTD32 citations87
US4774433ASep 27, 1988
Apparatus for generating metal ions
HITACHI LTD22 citations80
US4680507AJul 14, 1987
Liquid metal ion source
HITACHI LTD21 citations78
US4631448ADec 23, 1986
Ion source
HITACHI LTD25 citations78
US4841143AJun 20, 1989
Charged particle beam apparatus
HITACHI LTD15 citations74
US4733134AMar 22, 1988
Liquid metal ion source with pulse generator control
HITACHI LTD10 citations74
US4567398AJan 28, 1986
Liquid metal ion source
HITACHI LTD10 citations74
US4479060AOct 23, 1984
Apparatus for irradiation with charged particle beams
HITACHI LTD11 citations74
US4438371AMar 20, 1984
Source of charged particles beam
HITACHI LTD12 citations74
US4233509ANov 11, 1980
Ion-electron analyzer
HITACHI LTD10 citations74
US4687930AAug 18, 1987
Ion beam apparatus
HITACHI LTD7 citations72
US4510387AApr 9, 1985
Ion micro-analysis
HITACHI LTD11 citations72
US5086227AFeb 4, 1992
Secondary ion mass analyzing apparatus
HITACHI LTD7 citations71
US3986025AOct 12, 1976
Ion microanalyzer
HITACHI LTD14 citations69
US4551650ANov 5, 1985
Field-emission ion source with spiral shaped filament heater
HITACHI LTD7 citations68
US4081674AMar 28, 1978
Ion microprobe analyzer
HITACHI LTD8 citations68
US4900974AFeb 13, 1990
Ion source
HITACHI LTD2 citations63
US4624833ANov 25, 1986
Liquid metal ion source and apparatus
HITACHI LTD5 citations63
US4560907ADec 24, 1985
Ion source
HITACHI LTD3 citations63
US4163153AJul 31, 1979
Ion beam means
HITACHI LTD6 citations63
US4924101AMay 8, 1990
Charged particle source
HITACHI LTD1 citations52
US4833331AMay 23, 1989
Method of holding an electrically insulating sample
HITACHI LTD1 citations49