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Inventor
MICHL UWE
DE
2 patents
⚠️ This page may combine multiple inventors who share the name “MICHL UWE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JENOPTIK TECHNOLOGIE GMBH
1 patent
US5655869A
Aug 12, 1997
Device for coupling loading and unloading devices with semiconductor processing machines
JENOPTIK TECHNOLOGIE GMBH
69 citations
92
JENOPTIK JENA GMBH
1 patent
US4126376A
Nov 21, 1978
Manipulation device for precision adjustments including a double microscope having adjustable optical axes
JENOPTIK JENA GMBH
22 citations
71