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Inventor
COUTU ROGER R
US
7 patents
⚠️ This page may combine multiple inventors who share the name “COUTU ROGER R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MILLIPORE CORP
2 patents
US5738335A
Apr 14, 1998
Apparatus for isolating and containing reactive medium
MILLIPORE CORP
9 citations
71
US5984267A
Nov 16, 1999
Apparatus for isolating and containing reactive medium
MILLIPORE CORP
5 citations
60
ULTRATECH INC
2 patents
US9567670B2
Feb 14, 2017
Method for high-velocity and atmospheric-pressure atomic layer deposition with substrate and coating head separation distance in the millimeter range
ULTRATECH INC
3 citations
67
US9783888B2
Oct 10, 2017
Atomic layer deposition head
ULTRATECH INC
1 citations
46
COUTU ROGER R
2 patents
US9777371B2
Oct 3, 2017
ALD systems and methods
COUTU ROGER R
4 citations
62
US9175388B2
Nov 3, 2015
Reaction chamber with removable liner
COUTU ROGER R
3 citations
57
BECKER JILL S
1 patent
US9328417B2
May 3, 2016
System and method for thin film deposition
BECKER JILL S
2 citations
53