Inventor
SANDERFER ANNE E
US7 patents
Patents
7 patentsUS6159863ADec 12, 2000
Insitu hardmask and metal etch in a single etcher
ADVANCED MICRO DEVICES INC30 citations87
US6333263B1Dec 25, 2001
Method of reducing stress corrosion induced voiding of patterned metal layers
ADVANCED MICRO DEVICES INC7 citations73
US6274504B2Aug 14, 2001
Minimizing metal corrosion during post metal solvent clean
ADVANCED MICRO DEVICES INC8 citations72
US6174819B1Jan 16, 2001
Low temperature photoresist removal for rework during metal mask formation
ADVANCED MICRO DEVICES INC7 citations71
US6251776B1Jun 26, 2001
Plasma treatment to reduce stress corrosion induced voiding of patterned metal layers
ADVANCED MICRO DEVICES INC4 citations62
US6297065B1Oct 2, 2001
Method to rework device with faulty metal stack layer
ADVANCED MICRO DEVICES INC6 citations61
US6066546AMay 23, 2000
Method to minimize particulate induced clamping failures
ADVANCED MICRO DEVICES INC1 citations51