Inventor
UETA TOSHIO
US7 patents
⚠️ This page may combine multiple inventors who share the name “UETA TOSHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
6 patentsUS6686991B1Feb 3, 2004
Wafer stage assembly, servo control system, and method for operating the same
NIKON CORP44 citations92
US6523695B1Feb 25, 2003
Method and apparatus for operating a vibration isolation system having electronic and pneumatic control systems
NIKON CORP27 citations92
US6504162B1Jan 7, 2003
Stage device, control system, and method for stabilizing wafer stage and wafer table
NIKON CORP31 citations92
US7417714B2Aug 26, 2008
Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage
NIKON CORP10 citations82
US6618120B2Sep 9, 2003
Devices and methods for compensating for tilting of a leveling table in a microlithography apparatus
NIKON CORP20 citations82
US6963821B2Nov 8, 2005
Stage counter mass system
NIKON CORP0 citations52