Inventor

SETHI SATYENDRA S

US7 patents

⚠️ This page may combine multiple inventors who share the name “SETHI SATYENDRA S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VLSI TECHNOLOGY INC

2 patents

US5852497ADec 22, 1998

Method and apparatus for detecting edges under an opaque layer

VLSI TECHNOLOGY INC18 citations92

US6313542B1Nov 6, 2001

Method and apparatus for detecting edges under an opaque layer

VLSI TECHNOLOGY INC14 citations73

KONINKL PHILIPS ELECTRONICS NV

2 patents

US6433854B2Aug 13, 2002

Method of illumination uniformity in photolithographic systems

KONINKL PHILIPS ELECTRONICS NV7 citations73

US6642529B1Nov 4, 2003

Methods for the automated testing of reticle feature geometries

KONINKL PHILIPS ELECTRONICS NV5 citations53

VLSI TECHNOLOGY

1 patent

US5952135ASep 14, 1999

Method for alignment using multiple wavelengths of light

VLSI TECHNOLOGY23 citations92

NAT SEMICONDUCTOR CORP

1 patent

US5443941AAug 22, 1995

Plasma polymer antireflective coating

NAT SEMICONDUCTOR CORP42 citations88

PHILIP SEMICONDUCTORS INC

1 patent

US6262795B1Jul 17, 2001

Apparatus and method for the improvement of illumination uniformity in photolithographic systems

PHILIP SEMICONDUCTORS INC12 citations69