Inventor
HAGINIWA KUNIYASU
JP4 patents
Patents
4 patentsUS6130751AOct 10, 2000
Positioning method and apparatus
CANON KK34 citations90
US7312873B2Dec 25, 2007
Alignment method and parameter selection method
CANON KK8 citations68
US6973397B2Dec 6, 2005
Alignment method and parameter selection method
CANON KK5 citations68
US8779396B2Jul 15, 2014
Drawing apparatus, and method of manufacturing article
CANON KK0 citations45