Inventor
BYKANOV ALEXANDER N
US30 patents
⚠️ This page may combine multiple inventors who share the name “BYKANOV ALEXANDER N”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
22 patentsUS7491954B2Feb 17, 2009
Drive laser delivery systems for EUV light source
CYMER INC84 citations98
US7439530B2Oct 21, 2008
LPP EUV light source drive laser system
CYMER INC76 citations98
US7872245B2Jan 18, 2011
Systems and methods for target material delivery in a laser produced plasma EUV light source
CYMER INC90 citations97
US7671349B2Mar 2, 2010
Laser produced plasma EUV light source
CYMER INC54 citations97
US7372056B2May 13, 2008
LPP EUV plasma source material target delivery system
CYMER INC109 citations97
US7916388B2Mar 29, 2011
Drive laser for EUV light source
CYMER INC38 citations96
US7655925B2Feb 2, 2010
Gas management system for a laser-produced-plasma EUV light source
CYMER INC43 citations96
US7812329B2Oct 12, 2010
System managing gas flow between chambers of an extreme ultraviolet (EUV) photolithography apparatus
CYMER INC45 citations92
US7589337B2Sep 15, 2009
LPP EUV plasma source material target delivery system
CYMER INC23 citations92
US7482609B2Jan 27, 2009
LPP EUV light source drive laser system
CYMER INC37 citations92
US7465946B2Dec 16, 2008
Alternative fuels for EUV light source
CYMER INC40 citations92
US7449703B2Nov 11, 2008
Method and apparatus for EUV plasma source target delivery target material handling
CYMER INC45 citations92
US7378673B2May 27, 2008
Source material dispenser for EUV light source
CYMER INC43 citations92
US7109503B1Sep 19, 2006
Systems for protecting internal components of an EUV light source from plasma-generated debris
CYMER INC25 citations92
US7476886B2Jan 13, 2009
Source material collection unit for a laser produced plasma EUV light source
CYMER INC24 citations91
US7355191B2Apr 8, 2008
Systems and methods for cleaning a chamber window of an EUV light source
CYMER INC20 citations90
US8035092B2Oct 11, 2011
Laser produced plasma EUV light source
CYMER INC7 citations84
US8017924B2Sep 13, 2011
Drive laser delivery systems for EUV light source
CYMER INC13 citations84
US7928417B2Apr 19, 2011
LPP EUV light source drive laser system
CYMER INC11 citations84
US7518787B2Apr 14, 2009
Drive laser for EUV light source
CYMER INC11 citations84
US7402825B2Jul 22, 2008
LPP EUV drive laser input system
CYMER INC6 citations60
US7741626B2Jun 22, 2010
Spectral purity filters and methods therefor
CYMER INC0 citations52
BYKANOV ALEXANDER N
4 patentsUS8519366B2Aug 27, 2013
Debris protection system having a magnetic field for an EUV light source
BYKANOV ALEXANDER N26 citations92
US8198615B2Jun 12, 2012
Gas management system for a laser-produced-plasma EUV light source
BYKANOV ALEXANDER N21 citations92
US8704200B2Apr 22, 2014
Laser produced plasma EUV light source
BYKANOV ALEXANDER N11 citations83
US8633459B2Jan 21, 2014
Systems and methods for optics cleaning in an EUV light source
BYKANOV ALEXANDER N11 citations83