Inventor
MAGG CHRISTOPHER K
US6 patents
Patents
6 patentsUS6989219B2Jan 24, 2006
Hardmask/barrier layer for dry etching chrome films and improving post develop resist profiles on photomasks
IBM9 citations69
US6811959B2Nov 2, 2004
Hardmask/barrier layer for dry etching chrome films and improving post develop resist profiles on photomasks
IBM7 citations69
US7742632B2Jun 22, 2010
Alternating phase shift mask inspection using biased inspection data
IBM2 citations60
US7619730B2Nov 17, 2009
Mask inspection DNIR replacement based on location of tri-tone level database images—2P shapes
IBM0 citations42
US7443497B2Oct 28, 2008
Mask inspection DNIR placement based on location of tri-tone level database images (2P shapes)
IBM0 citations42
US7494748B2Feb 24, 2009
Method for correction of defects in lithography masks
IBM0 citations40