Inventor
MCDOUGALL BRENDAN
US5 patents
Patents
5 patentsUS7798096B2Sep 21, 2010
Plasma, UV and ion/neutral assisted ALD or CVD in a batch tool
APPLIED MATERIALS INC487 citations98
US7749574B2Jul 6, 2010
Low temperature ALD SiO2
APPLIED MATERIALS INC33 citations92
US7897208B2Mar 1, 2011
Low temperature ALD SiO2
APPLIED MATERIALS INC9 citations83
US7781016B2Aug 24, 2010
Method for measuring precursor amounts in bubbler sources
APPLIED MATERIALS INC3 citations61
US7921803B2Apr 12, 2011
Chamber components with increased pyrometry visibility
APPLIED MATERIALS INC5 citations60