Inventor

HAYASHI TOKUTAROU

JP14 patents

⚠️ This page may combine multiple inventors who share the name “HAYASHI TOKUTAROU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

10 patents

US8055376B2Nov 8, 2011

Substrate processing system, substrate placing position adjusting method and storage medium

TOKYO ELECTRON LTD13 citations82

US7884622B2Feb 8, 2011

Method of adjusting moving position of transfer arm and position detecting jig

TOKYO ELECTRON LTD11 citations81

US9136150B2Sep 15, 2015

Substrate processing apparatus, substrate processing method and non-transitory storage medium

TOKYO ELECTRON LTD6 citations71

US10879100B2Dec 29, 2020

Substrate transfer device, substrate transfer method and recording medium

TOKYO ELECTRON LTD4 citations69

US9507349B2Nov 29, 2016

Substrate transfer apparatus, substrate transfer method, and non-transitory storage medium

TOKYO ELECTRON LTD3 citations68

US12074048B2Aug 27, 2024

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD0 citations58

US9299599B2Mar 29, 2016

Thermal processing apparatus for thermal processing substrate and positioning method of positioning substrate transfer position

TOKYO ELECTRON LTD1 citations51

US9268327B2Feb 23, 2016

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD1 citations51

US12543525B2Feb 3, 2026

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD0 citations48

US10256127B2Apr 9, 2019

Substrate transfer apparatus, substrate transfer method, and non-transitory storage medium

TOKYO ELECTRON LTD0 citations47

HAYASHI TOKUTAROU

2 patents

US8781787B2Jul 15, 2014

Substrate carrying mechanism, substrate carrying method and recording medium storing program including set of instructions to be executed to accomplish the substrate carrying method

HAYASHI TOKUTAROU9 citations78

US9240337B2Jan 19, 2016

Substrate transport method, substrate transport apparatus, and coating and developing system

HAYASHI TOKUTAROU1 citations48

DOUKI YUICHI

1 patent

US8755935B2Jun 17, 2014

Substrate holder positioning method and substrate processing system

DOUKI YUICHI2 citations56

DOKI YUICHI

1 patent

US8433436B2Apr 30, 2013

Substrate processing system, substrate placing position adjusting method and storage medium

DOKI YUICHI3 citations54