Inventor

TOKIMITSU TAKUMI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “TOKIMITSU TAKUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKIMITSU TAKUMI

2 patents

US8797542B2Aug 5, 2014

Measurement apparatus

TOKIMITSU TAKUMI2 citations55

US8179520B2May 15, 2012

Optical element, projection optical system, exposure apparatus, and device fabrication method

TOKIMITSU TAKUMI2 citations50

SUMIYOSHI YUHEI

1 patent

US8437004B2May 7, 2013

Detection apparatus

SUMIYOSHI YUHEI0 citations43