Inventor
SHANKAR SADASIVAN
US13 patents
⚠️ This page may combine multiple inventors who share the name “SHANKAR SADASIVAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
7 patentsUS6883153B2Apr 19, 2005
Minimization of microelectronic interconnect thickness variations
INTEL CORP22 citations92
US7021999B2Apr 4, 2006
Rinse apparatus and method for wafer polisher
INTEL CORP16 citations90
US10840366B2Nov 17, 2020
Nanowire structures having wrap-around contacts
INTEL CORP1 citations72
US7279084B2Oct 9, 2007
Apparatus having plating solution container with current applying anodes
INTEL CORP7 citations62
US6908370B1Jun 21, 2005
Rinse apparatus and method for wafer polisher
INTEL CORP4 citations60
US6887131B2May 3, 2005
Polishing pad design
INTEL CORP1 citations52
US9577057B2Feb 21, 2017
Semiconductor device contacts
INTEL CORP0 citations51