Inventor
KIM HO SEOB
KR28 patents
⚠️ This page may combine multiple inventors who share the name “KIM HO SEOB”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KIM HO SEOB
8 patentsUS8912506B2Dec 16, 2014
Device for sustaining differential vacuum degrees for electron column
KIM HO SEOB3 citations62
US8071955B2Dec 6, 2011
Magnetic deflector for an electron column
KIM HO SEOB2 citations62
US7935926B2May 3, 2011
Inspection equipment for fine pattern and morphology using microcolumn
KIM HO SEOB3 citations62
US8890092B2Nov 18, 2014
Multi-particle beam column having an electrode layer including an eccentric aperture
KIM HO SEOB2 citations59
US8173978B2May 8, 2012
Method for controlling electron beam in multi-microcolumn and multi-microcolumn using the same
KIM HO SEOB5 citations58
US8324573B2Dec 4, 2012
Detector for electron column and method for detecting electrons for electron column
KIM HO SEOB0 citations51
US8071944B2Dec 6, 2011
Portable electron microscope using micro-column
KIM HO SEOB0 citations37
US9837245B2Dec 5, 2017
Micro stage for particle beam column using piezo elements as actuator
KIM HO SEOB0 citations31
ETEC SYSTEMS INC
7 patentsUS6281508B1Aug 28, 2001
Precision alignment and assembly of microlenses and microcolumns
ETEC SYSTEMS INC53 citations95
US6023060AFeb 8, 2000
T-shaped electron-beam microcolumn as a general purpose scanning electron microscope
ETEC SYSTEMS INC58 citations95
US6288401B1Sep 11, 2001
Electrostatic alignment of a charged particle beam
ETEC SYSTEMS INC26 citations92
US6195214B1Feb 27, 2001
Microcolumn assembly using laser spot welding
ETEC SYSTEMS INC32 citations89
US6297584B1Oct 2, 2001
Precision alignment of microcolumn tip to a micron-size extractor aperture
ETEC SYSTEMS INC14 citations71
US6077417AJun 20, 2000
Silicon microlens cleaning system
ETEC SYSTEMS INC9 citations71
US6171165B1Jan 9, 2001
Precision alignment of microcolumn tip to a micron-size extractor aperture
ETEC SYSTEMS INC2 citations60
CEBT CO LTD
4 patentsUS7968844B2Jun 28, 2011
Hole inspection apparatus and hole inspection method using the same
CEBT CO LTD4 citations61
US7902521B2Mar 8, 2011
Method for focusing electron beam in electron column
CEBT CO LTD6 citations61
US7329878B2Feb 12, 2008
Method for manufacturing a lens assembly of microcolumn and lens assembly of microcolumn manufactured by the same
CEBT CO LTD6 citations61
US8044351B2Oct 25, 2011
Micro-column with simple structure
CEBT CO LTD3 citations58