P

Inventor

PARK SANG O

KR23 patents
⚠️ This page may combine multiple inventors who share the name “PARK SANG O”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

10 patents
US6232228B1May 15, 2001

Method of manufacturing semiconductor devices, etching composition for manufacturing semiconductor devices, and semiconductor devices made using the method

SAMSUNG ELECTRONICS CO LTD77 citations95
US5883060AMar 16, 1999

Cleaning compositions for wafers used in semiconductor devices

SAMSUNG ELECTRONICS CO LTD21 citations92
US6436809B1Aug 20, 2002

Method of manufacturing semiconductor devices, etching compositions for manufacturing semiconductor devices, and semiconductor devices made using this method

SAMSUNG ELECTRONICS CO LTD19 citations91
US6140233AOct 31, 2000

Method of manufacturing semiconductor devices, etching compositions for manufacturing semiconductor devices, and semiconductor devices thereby

SAMSUNG ELECTRONICS CO LTD32 citations91
US5983704ANov 16, 1999

Method of measuring and analyzing contamination particles generated during the manufacture of semiconductor devices

SAMSUNG ELECTRONICS CO LTD18 citations91
US5782984AJul 21, 1998

Method for cleaning an integrated circuit device using an aqueous cleaning composition

SAMSUNG ELECTRONICS CO LTD16 citations81
US6232239B1May 15, 2001

Method for cleaning contact holes in a semiconductor device

SAMSUNG ELECTRONICS CO LTD11 citations73
US6071827AJun 6, 2000

Method for manufacturing semiconductor devices

SAMSUNG ELECTRONICS CO LTD12 citations73
US5880355AMar 9, 1999

Apparatus for measuring contamination particles during the manufacture of semiconductor devices

SAMSUNG ELECTRONICS CO LTD11 citations72
US6037269AMar 14, 2000

Etching methods of silicon nitride films employed in microelectronic devices

SAMSUNG ELECTRONICS CO LTD2 citations62

LG ELECTRONICS INC

5 patents

KIM YOUNG IN

5 patents

KIM JEONG WOO

2 patents

YOO HUI SANG

1 patent