Inventor
MURAKAMI KOTARO
JP14 patents
⚠️ This page may combine multiple inventors who share the name “MURAKAMI KOTARO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
4 patentsUS9412587B2Aug 9, 2016
Method of manufacturing semiconductor device, substrate processing apparatus, gas supply system, and recording medium
HITACHI INT ELECTRIC INC4 citations83
US9691609B2Jun 27, 2017
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
HITACHI INT ELECTRIC INC2 citations72
US9941119B2Apr 10, 2018
Method of forming silicon layer in manufacturing semiconductor device and recording medium
HITACHI INT ELECTRIC INC1 citations61
US9540728B2Jan 10, 2017
Substrate processing apparatus, apparatus for manufacturing semiconductor device, and gas supply system
HITACHI INT ELECTRIC INC0 citations51
MITSUBISHI GAS CHEMICAL CO
3 patentsUS10683253B2Jun 16, 2020
Method for producing high-purity terephthalic acid
MITSUBISHI GAS CHEMICAL CO1 citations59
US10385001B2Aug 20, 2019
Method of producing terephthalic acid
MITSUBISHI GAS CHEMICAL CO0 citations39
US10273197B2Apr 30, 2019
Method for producing high-purity terephthalic acid
MITSUBISHI GAS CHEMICAL CO0 citations38
AKAE NAONORI
2 patentsKOKUSAI ELECTRIC CORP
2 patentsUS11043392B2Jun 22, 2021
Method of manufacturing semiconductor device, substrate processing apparatus and recording medium
KOKUSAI ELECTRIC CORP0 citations51
US12503762B2Dec 23, 2025
Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations48